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US 2016/0236314 A1Published application
Polishing device and polishing method
AssigneeFujimi Incorporated
InventorsHitoshi MORINAGA, Hiroshi ASANO, Shingo OTSUKI, Kazusei TAMAI
Life of this patent
Estimating the term…
Abstract
A polishing device includes a motor movement mechanism and a second motor that rotates a workpiece. The motor movement mechanism moves the workpiece in a direction tangential to a radially outer circumferential surface of a polishing member and moves the workpiece in a direction orthogonal to a rotational axis of the polishing member.
Claims31
-18. (canceled)
A device that polishes a workpiece, the polishing device comprising:
- a polishing member including a polishing surface that is shaped in conformance with a shape of a portion to be polished of the workpiece;
- and
- a movement mechanism that moves at least one of the workpiece and the polishing member in a direction tangential to a radially outer circumferential surface of the polishing member.
A device that polishes a workpiece, the polishing device comprising:
- a polishing member including a polishing surface that is shaped in conformance with a shape of a portion to be polished of the workpiece;
- and
- a rotation mechanism that rotates at least one of the workpiece and the polishing member.
A device that polishes a workpiece, the polishing device comprising:
- a polishing member including a polishing surface that is shaped in conformance with a shape of a portion to be polished of the workpiece;
- and
- a pressing mechanism that presses at least one of the workpiece and the polishing member in a direction orthogonal to a rotation axis of the polishing member.
Dependencies are inferred from the claim text.