Apparatus and method for manufacturing display apparatus
AssigneeSamsung Display Co., Ltd.
InventorsYunah CHUNG, Eungseok PARK, Wonmin YUN, Byoungduk LEE, Yoonhyeung CHO, Yongchan JU
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Abstract
An apparatus for manufacturing a display apparatus includes a stage supporting a substrate, a deposition gas supplying unit above the substrate, the deposition gas supplying unit spraying a deposition gas onto the substrate, and a first mask between the stage and the deposition gas supplying unit, the first mask including at least two first openings through which the deposition gas selectively passes.
Claims19
An apparatus for manufacturing a display apparatus, the apparatus comprising:
- a stage supporting a substrate;
- a deposition gas supplying unit above the stage, the deposition gas supplying unit spraying a deposition gas toward the stage;
- and
- a first mask between the stage and the deposition gas supplying unit, the first mask including at least two first openings through which the deposition gas selectively passes.
A method for manufacturing a display apparatus, the method comprising:
- forming a display unit on a substrate, the display unit including organic light-emitting devices;
- spraying a deposition gas onto the substrate from a deposition gas supplying unit through at least two openings of a first mask, such that a first inorganic layer is formed in at least two corresponding inserted portions of the organic light-emitting devices in the display unit;
- and
- forming a second inorganic layer on the first inorganic layer.
A method for manufacturing a display apparatus, the method comprising:
- forming a display unit on a substrate;
- forming a second inorganic layer along an outer surface of the display unit;
- and
- forming a first inorganic layer on an inserted portion of the second inorganic layer so as to fill the inserted portion of the second inorganic layer.
Dependencies are inferred from the claim text.