Semiconductor structure and manufacturing method of the same
AssigneeMacronix International Co., Ltd.
InventorErh-Kun Lai
Life of this patent
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AssigneeMacronix International Co., Ltd.
InventorErh-Kun Lai
Estimating the term…
A semiconductor structure and a manufacturing method thereof are provided. The semiconductor structure includes a substrate having a trench, a stacked strip structure formed in the trench, and at least a conductive structure. The stacked strip structure includes a plurality of interlaced conductive strips and insulating strips. Each of the conductive strips has a horizontal conductive segment and two vertical conductive segments connected to the corresponding horizontal conductive segment. Each of the insulating strips has a horizontal insulating segment and two vertical insulating segments. The conductive structure is electrically connected to at least one of the conductive strips. The stacked strip structure has a horizontal stacked portion corresponding to the horizontal conductive segments and two vertical stacked portions corresponding to the vertical conductive segments, wherein a width of the vertical stacked portions is larger than a thickness of the horizontal stacked portion.
A semiconductor structure, comprising:
A manufacturing method of a semiconductor structure, comprising:
Dependencies are inferred from the claim text.