Optical system
AssigneeApplied Materials, Inc.
InventorJoseph M. RANISH
Life of this patent
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Abstract
Implementations of the present disclosure generally relate to an improved lamphead assembly for use in a thermal processing chamber. In one implementation, a lamphead assembly comprises a lamp housing tube comprising a lamp disposed therein, the lamp housing tube having an open end facing towards the substrate support, and an insert tube disposed within the lamp housing tube, the insert tube surrounds at least a portion of the lamp and has a constant inner diameter throughout the entire length of the insert tube, wherein the insert tube collimates radiant energy from the lamp toward the substrate support. The insert tube comprises a cylindrical lower portion disposed adjacent to the open end of the lamp housing tube, and a tapered upper portion integrated with the cylindrical lower portion as one body.
Claims20
A lamphead assembly for heating a substrate disposed on a substrate support, comprising:
- a lamp housing tube comprising a lamp disposed therein, the lamp housing tube having an open end facing towards the substrate support;
- and
- an insert tube disposed within the lamp housing tube, the insert tube surrounds at least a portion of the lamp and has a constant inner diameter throughout the entire length of the insert tube, wherein the insert tube collimates radiant energy from the lamp toward the substrate support, the insert tube comprises:
- a cylindrical lower portion disposed adjacent to the open end of the lamp housing tube;
- and
- a tapered upper portion integrated with the cylindrical lower portion as one body.
A lamphead assembly for heating a substrate disposed on a substrate support, comprising:
- a lamp housing tube comprising a lamp disposed therein, the lamp housing tube having an open end facing towards the substrate support;
- an insert cap disposed within the lamp housing tube, wherein the insert cap is formed as a U-shaped body with its close end disposed towards the open end of the lamp housing tube, and the insert cap comprises:
- a cylindrical lower portion defining a cavity for containing at least a portion of the lamp;
- and
- a tapered upper portion;
- and
- a reflector disposed between the insert cap and the lamp housing tube, wherein the reflector, the insert cap, and the lamp housing tube are generally coaxial.
A process chamber for processing a substrate, comprising:
- a rotatable substrate support disposed within the process chamber, the substrate support having a substrate support surface;
- a lower dome disposed relatively below the substrate support, the lower dome comprising:
- a central opening;
- a peripheral flange;
- and
- a bottom extended radially outward to connect the peripheral flange and the central opening, wherein a tangent line on an outside surface of the bottom that passes through an intersection of the bottom and the peripheral flange of the lower dome is at an angle of about 8° to about 16° with respect to a planar bottom surface of the peripheral flange of the lower dome;
- and
- an upper dome disposed relatively above the substrate support, the upper dome being opposed to the lower dome, the upper dome comprising:
- a central window portion;
- and
- a peripheral flange engaging the central window portion at a circumference of the central window portion, wherein a tangent line on an inside surface of the central window portion that passes through an intersection of the central window portion and the peripheral flange is at an angle of about 8° to about 16° with respect to a planar upper surface of the peripheral flange;
- and
- a lamphead assembly disposed adjacent to the lower dome, comprising:
- a lamp housing tube comprising a lamp disposed therein, the lamp housing tube having an open end facing towards the substrate support;
- and
- an insert tube disposed within the lamp housing tube, the insert tube surrounds at least a portion of the lamp and has a constant inner diameter throughout the entire length of the insert tube, wherein the insert tube collimates radiant energy from the lamp toward the substrate support, the insert tube comprises:
- a cylindrical lower portion disposed adjacent to the open end of the lamp housing tube;
- and
- a tapered upper portion integrated with the cylindrical lower portion as one body.
Dependencies are inferred from the claim text.