Substrate cover

A substrate cover comprising:

• a conductive frame body covering a surface circumference edge region and an upper circumference region of a substrate drawn with a charged particle beam, the conductive frame body comprising, a notch portion provided at part of an inner circumference of the conductive frame body, and a recessed portion provided on the outer circumference side of the upper surface of the conductive frame body, such that the recessed portion is arranged adjacent to the notch portion in a direction of a frame width of the conductive frame body;
• and
• a first conductive member provided on the recessed portion so as to pass through the notch portion to project inward to the inside of the frame of the conductive frame body, the first conductive member comprising a conductive member main body, a contact portion electrically connected to the surface of the substrate, and a brim portion covering an upper portion of a gap between an inner wall of the notch portion and the conductive member main body.