Magnet plate assembly, deposition apparatus including the same, and method of deposition using the same

A deposition apparatus, comprising:

• a deposition source discharging a deposition material;
• a mask interposed between the deposition source and a substrate and through which the deposition material passes before being deposited on the substrate;
• and
• a magnet plate assembly for applying a magnetic force to the mask by being disposed on a surface of the substrate that is different from a surface of the substrate which contacts the mask, wherein the magnet plate assembly comprises:
• a plurality of magnetic bodies, each magnetic body having a first surface formed to correspond to a flat surface of the substrate and to contact the flat surface of the substrate and a second surface formed in a different direction from that of the first surface;
• and
• a support frame which supports the plurality of magnetic bodies and has a plurality of grooves in which the plurality of magnetic bodies are respectively seated.

A method of deposition, comprising:

• disposing a mask onto one surface of a substrate in a chamber;
• disposing a magnet plate assembly in a direction of another surface of the substrate, wherein the magnet plate assembly comprises:
• a plurality of magnetic bodies, each magnetic body having a first surface formed to correspond to a flat surface of the substrate and to closely contact the flat surface of the substrate and a second surface formed in a different direction from that of the first surface;
• and a support frame for supporting the plurality of magnetic bodies;
• and
• depositing one or more deposition materials vaporized from a deposition source provided in the chamber onto the substrate through slits formed in the mask.