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US 2016/0097123 A1Published application
Multiple temperature range susceptor, assembly, reactor and system including the susceptor, and methods of using the same
AssigneeASM IP Holding B.V.
InventorJohn Kevin Shugrue
Life of this patent
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Abstract
Susceptor assemblies, reactors and systems including the assemblies, and methods of using the assemblies, reactors, and systems are disclosed. Exemplary susceptor assemblies include two or more sections that can be moved relative to each other to allow rapid changes in a substrate temperature. The movement of the two or more sections can additionally or alternatively be used to manipulate conductance of gas flow though a reactor.
Claims20
A susceptor assembly comprising:
- a susceptor first section formed of a first material;
- a susceptor second section formed of a second material;
- and
- a mechanism to move the susceptor first section relative the susceptor second section,
- wherein the susceptor first section is movable relative to the susceptor second section to provide variable heat to a substrate.
2 more elements
A reactor comprising:
- a reaction chamber;
- and
- a susceptor comprising:
- a susceptor first section formed of a first material;
- a susceptor second section formed of a second material;
- and
- a mechanism to move the susceptor first section relative the susceptor second section within the reaction chamber, wherein the susceptor first section is movable relative to the susceptor second section to provide variable heat to a substrate.
4 more elements
A gas-phase method comprising the steps of:
- placing a substrate on a surface of a susceptor assembly comprising a susceptor first section and a susceptor second section;
- exposing the substrate to a first process when the susceptor first section is in a first position and at a first susceptor temperature;
- moving the susceptor first section relative to the susceptor second section to a second position;
- and
- exposing the substrate to a second process at a second susceptor temperature.
2 more elements
Dependencies are inferred from the claim text.