US 2016/0097117 A1Published application

Method and apparatus for stably evaporation depositing uniform thin films

AssigneeNational Chung Shan Institute of Science and Technology

InventorsSHIH-CHANG LIANG, WEI-CHIEH HUANG, CHAO-NAN WEI, CUO-YO NI, HUI-YUN BOR

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Abstract

In a method and apparatus for evaporation depositing uniform thin films, a film is deposited on a substrate of a vacuum environment while maintaining a constant deposition rate. A cover is installed on a wall of the evaporation vessel. When the evaporation material is heated to an evaporation state and the interior of the evaporation vessel reaches a first vapor saturation pressure, the vapor of the evaporation material flows towards a pressure stabilizing chamber. When the pressure stabilizing chamber reaches a second vapor saturation pressure which is smaller than the first vapor saturation pressure, the vacuum environment has a vacuum background pressure which is smaller than the second vapor saturation pressure, so that the evaporation material vapor flows from the pressure stabilizing chamber towards the vacuum environment at constant rate due to the pressure difference, so as to evaporate the substrate.

Claims13

Dependent claims

A method for evaporation depositing uniform thin films, provided for evaporation depositing the thin film on a substrate in a vacuum environment system to enhance the uniformity of the thin film by maintaining the deposition rate, and the method comprising the steps of:

placing at least one evaporation material in at least one evaporation vessel, and heating the evaporation material by at least one heater, wherein a cover is installed on a wall of the evaporation vessel;
controlling the evaporation by the cover, such that the interior of the evaporation vessel has a first vapor saturation pressure when the evaporation material is heated to an evaporation state;
flowing a vapor of the evaporation material towards a pressure stabilizing chamber, such that the interior of the pressure stabilizing chamber has a second vapor saturation pressure, wherein the second vapor saturation pressure is smaller than the first vapor saturation pressure, so that the vapor of the evaporation material continues flowing into the pressure stabilizing chamber;
and
the vacuum environment system has a vacuum background pressure, and the vacuum background pressure is smaller than the second vapor saturation pressure, and the vapor of the evaporation material flows from the pressure stabilizing chamber to the vacuum environment system due to the pressure difference between the second vapor saturation pressure and the vacuum background pressure, so as to evaporation deposition the substrate at a constant rate.

2 more elements

An apparatus for stably evaporation depositing uniform thin films, provided for evaporation depositing the thin film on a substrate in a vacuum environment system to enhance the uniformity of the thin film by maintaining the deposition rate, and the apparatus comprising:

at least one evaporation vessel, having an evaporation material contained therein;
at least one cover, covered onto a wall of the evaporation vessel to seal the evaporation vessel, and having a flow hole formed thereon;
at least one heater, for heating the evaporation vessel, so that the interior of the evaporation vessel has a first vapor saturation pressure;
and
at least one pressure stabilizing chamber, disposed on a side of the evaporation vessel, and having a nozzle orifice, such that when the evaporation vessel reaches the first vapor saturation pressure, the vapor of the evaporation material flows from the flow hole into the pressure stabilizing chamber, and the interior of the pressure stabilizing chamber has a second vapor saturation pressure, wherein the vacuum environment system has a vacuum background pressure, and the second vapor saturation pressure is smaller than the first vapor saturation pressure and greater than the vacuum background pressure, and the vapor of the evaporation material flows from the nozzle orifice into the vacuum environment system due to the pressure difference between the vacuum background pressure and the second vapor saturation pressure, so as to form a thin film on the substrate at a constant evaporation rate.

2 more elements

Dependencies are inferred from the claim text.