Imprint method, imprint apparatus, and article manufacturing method

An imprint apparatus for performing an imprint process of forming a pattern of an imprint material by using a mold on each of a plurality of shot regions on a substrate, the apparatus comprising:

• a measurement device configured to measure relative position between the mold and each of the plurality of shot regions;
• a correction unit configured to correct the relative position of the shot regions and the mold;
• and
• a controller configured to control first alignment between a target shot region for the imprint process and the mold performed by driving said correction unit before bringing the mold and the imprint material on the target shot region into contact with each other, second alignment between the mold and the target shot region performed by driving said correction unit after bringing the mold and the imprint material on the target shot region into contact with each other, and the imprint process performed on the target shot region after performing the second alignment,
• wherein said controller is configured to perform the first alignment based on the relative positions of the target shot region measured by said measurement device and a driving amount of said correction unit in the second alignment for another shot region where the imprint process has been performed earlier than in the target shot region.

A method of manufacturing an article, the method comprising:

• forming a pattern on a substrate by an imprint method of performing an imprint process of forming a pattern of an imprint material by using a mold on each of a plurality of shot regions of the substrate;
• and
• processing the substrate, on which the pattern has been formed, to manufacture the article,
• wherein the imprint method comprises:
• before bringing the mold and the imprint material on a target shot region for the imprint process into contact with each other, obtaining relative position between the target shot region and the mold, and performing first alignment between the target shot region and the mold by driving a correction unit configured to correct the relative position between the target shot region and the mold;
• after bringing the mold and the imprint material on the target shot region into contact with each other, performing second alignment between the target shot region and the mold by driving the correction unit;
• and
• performing the imprint process on the target shot region after the second alignment,
• wherein the first alignment includes alignment performed based on a driving amount of the correction unit in the second alignment for another shot region where the imprint process has been performed earlier than in the target shot region.