Mask assembly for deposition, deposition apparatus, and method employing the same
AssigneeSamsung Display Co., Ltd.
InventorsSangmin YI, Mingoo KANG, Minchul SONG, Sangshin LEE, Sangyun LEE
Life of this patent
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Abstract
Disclosed is a mask assembly for deposition including: a frame having an opening; a mask having at least one pattern part formed in a second direction that is different from a first direction, wherein at least a portion of the mask is supported by the frame and the at least one pattern part has one or more slits continuously formed in the first direction; and at least one support stick extending in the second direction across the opening so as to support at least a portion of the mask.
Claims20
A mask assembly for deposition, comprising:
- a frame comprising an opening;
- a mask comprising at least one pattern part extending in a second direction, the second direction being different from a first direction;
- and
- at least one support stick extending in the second direction across the opening and supporting a first portion of the mask,
- wherein a second portion the mask is supported by the frame, and
- wherein each pattern part comprises one or more slits continuously formed in the first direction.
A deposition apparatus, comprising:
- a mask assembly for deposition comprising:
- a frame comprising an opening;
- a mask comprising at least one pattern part extending in a second direction, the second direction being different from a first direction;
- and
- at least one support stick extending in the second direction across the opening and supporting a first portion of the mask,
- wherein a second portion the mask is supported by the frame, and
- wherein each pattern part comprises one or more slits continuously formed in the
- first direction, and
- a magnet plate disposed on a surface of the substrate different from a surface of the substrate contacting the mask, and configured to apply a magnetic force to the mask.
A deposition method, comprising:
- disposing a mask onto one surface of a substrate in a chamber;
- disposing a magnet plate onto another surface of the substrate;
- and
- depositing a vaporized deposition material from a deposition source onto the substrate through slits formed in the mask,
- wherein at least a first portion of the mask is supported by a frame,
- wherein the mask comprises at least one pattern part formed in a second direction that is different from a first direction,
- wherein the at least one pattern part comprises one or more slits continuously formed in the first direction, and
- wherein a second portion of the mask is supported by at least one support stick extending in the second direction across the opening.
Dependencies are inferred from the claim text.