Semiconductor manufacturing apparatus, control method of electrostatic chuck, and electrostatic chuck device
AssigneeKabushiki Kaisha Toshiba
InventorMasakatsu TAKEUCHI
Life of this patent
Estimating the term…
Abstract
According to one embodiment, a semiconductor manufacturing apparatus comprises an electrostatic chuck and a control unit. The electrostatic chuck includes an electrode. The electrode generates electrostatic force. A work is mounted onto the electrostatic chuck. The work is attracted and stuck to the electrostatic chuck by the electrostatic force. The control unit controls a voltage supplied to the electrode. The control unit adjusts the voltage according to change in attractive force on the work to the electrostatic chuck associated with mounting works onto the electrostatic chuck and processing the works.
Claims20
A semiconductor manufacturing apparatus, comprising:
- an electrostatic chuck including an electrode to generate electrostatic force and onto which to mount a work attracted and stuck by the electrostatic force;
- and
- a control unit that controls a voltage supplied to the electrode,
- wherein the control unit adjusts the voltage according to change in attractive force on the work to the electrostatic chuck associated with mounting works onto the electrostatic chuck and processing the works.
A control method of an electrostatic chuck, comprising:
- generating electrostatic force between a work mounted on the electrostatic chuck and an electrode provided in the electrostatic chuck by voltage supply to the electrode;
- making the work be attracted and stuck to the electrostatic chuck by the electrostatic force;
- and
- adjusting the voltage, thereby reducing a change in attractive force on the work to the electrostatic chuck associated with mounting works onto the electrostatic chuck and processing the works.
An electrostatic chuck device comprising:
- an electrostatic chuck including an electrode to generate electrostatic force and onto which to mount a work attracted by the electrostatic force;
- and
- a temperature measuring unit that measures a temperature of the electrostatic chuck,
- wherein a voltage supplied to the electrode is adjusted based on a result of measuring the temperature of the electrostatic chuck by the temperature measuring unit.
Dependencies are inferred from the claim text.