Method of controlling mems variable capacitor and integrated circuit device

An integrated circuit device comprising:

• a MEMS variable capacitor comprising first and second electrodes, and having a capacitance varying according to a voltage applied between the first and second electrodes;
• a voltage application unit applying a voltage between the first and second electrodes;
• an evaluation unit evaluating whether the capacitance of the MEMS variable capacitor satisfies a predetermined condition while the voltage is being applied between the first and second electrodes;
• and
• an applied voltage determination unit determining that the voltage applied between the first and second electrodes is a voltage which should be applied therebetween, on a condition that the capacitance of the MEMS variable capacitor is evaluated as satisfying the predetermined condition.

A method of controlling a MEMS variable capacitor comprising first and second electrodes, and having a capacitance varying according to a voltage applied between the first and second electrodes, the method comprising:

• applying a voltage between the first and second electrodes;
• measuring the capacitance of the MEMS variable capacitor while the voltage is being applied between the first and second electrodes;
• and
• applying the voltage between the first and second electrodes, on a condition that the capacitance of the MEMS variable capacitor is satisfying a predetermined condition.