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US 2016/0041194 A1Published application
Acceleration sensor structure and use thereof
AssigneeMurata Electronics Oy
InventorsVille Pekka RYTKÖNEN, Leif ROSCHIER, Anssi BLOMQVIST
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Abstract
A MEMS-sensor structure comprising first means and second means coupled for double differential detection and positioned symmetrically to provide quantities for the double differential detection in a phase shift. If the sensor deforms, due to a specifically symmetric positioning of the first and second means, the effect of the displacement is at least partly eliminated.
Claims4
A sensor structure matrix, comprising sensor cells with a planar structure, wherein said sensor cells are arranged into a common plane to detect acceleration components in the common plane,
- a pair of sensor cells is arranged for detection in a first in-plane direction;
- a pair of sensor cells is arranged for detection in a second in-plane direction, wherein the second in-plane direction is perpendicular to the first direction;
- and
- the pairs of sensor cells are positioned to provide compensating symmetry in the common plane of the sensor structure matrix.
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Dependencies are inferred from the claim text.