Mass flow controller for improved performance across fluid types

A mass flow controller comprising:

• a valve that is adjustable to control a flow rate of a fluid responsive to a control signal;
• a pressure transducer that provides a pressure signal that indicates a pressure of the fluid;
• a memory to store general characterization data that characterizes the mass flow controller in connection with a calibration gas;
• a mass flow sensor that provides a measured flow rate of the fluid;
• a multi-gas control component that generates an open-loop process control signal value for the desired flow value and pressure using a modified-flow-value that is based upon the desired process gas flow value, a molecular mass for the selected process gas type, and a molecular mass for the calibration gas;
• and
• a multi-mode control component that disengages a feedback control loop when a threshold condition is satisfied and controls the valve using the open-loop process control signal.