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US 2015/0316436 A1Published application
Vertical membranes for pressure sensing applications
AssigneeSilicon Microstructures, Inc.
InventorHolger Doering
Life of this patent
Estimating the term…
Abstract
Pressure sensors having vertical diaphragms or membranes. A vertical diaphragm may be located in a first silicon wafer between a first and second cavity, where the first and second cavities are covered by a second silicon wafer. One or more active or passive devices or components may be located on a top of the vertical diaphragm.
Claims29
A pressure sensor comprising:
- a first portion formed of a first silicon wafer and having a first cavity and a second cavity in a top side such that a vertical membrane is formed between the first cavity and the second cavity;
- a second portion formed of a second silicon wafer and having a bottom side contacting the top side of the first portion such that the first cavity is sealed to form a reference cavity,
- a passage through the first portion from a bottom side of the first portion to the second cavity such that the second cavity forms a pressurized cavity;
- a first device formed in a top side of the second portion over the vertical membrane;
- and
- a second device formed in the top side of the second portion over the vertical membrane.
3 more elements
A pressure sensor comprising:
- a first portion formed of a first silicon wafer and having a first etched recess and a second etched recess formed in a top side such that a vertical membrane is formed between the first etched recess and the second etched recess;
- a second portion formed of a second silicon wafer and having a bottom side contacting the top side of the first portion such that a first cavity is defined by the first etched recess and a bottom of the second portion and a second cavity is defined by the second etched recess and a bottom of the second portion;
- a first passage through the second portion from a top side of the second portion to the first cavity such that the first cavity forms a first pressurized cavity;
- and
- a first device formed in a top side of the second portion over the vertical membrane.
2 more elements
A pressure sensor comprising:
- a first vertical membrane between a first cavity and a second cavity;
- the first cavity formed by a first recess formed in a top of a first wafer, the first recess covered by a bottom of a second wafer;
- the second cavity formed by a second recess formed in the top of the first wafer, the second recess covered by the bottom of the second wafer;
- and
- a first device formed in a top surface of the second wafer.
2 more elements
A pressure sensor comprising:
- a first wafer having a first recess and a second recess etched in a top side such that a vertical membrane is formed between the first recess and the second recess, wherein the vertical membrane has a first lateral portion and a second lateral portion, the first lateral portion thicker than the second lateral portion;
- and
- a second wafer having a bottom side attached to the top side of first wafer such that a first cavity is formed by the first recess and the bottom of the second wafer and a second cavity is formed by the second recess and the bottom of the second wafer.
Dependencies are inferred from the claim text.