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US 2015/0311047 A1Published application
Methods of manufacturing large-area sputtering targets using interlocking joints
AssigneeH.C. Starck GmbH
InventorsScott Jeffrey Volchko, William Loewenthal, Stefan Zimmermann, Mark Gaydos, Steven Alfred Miller
Life of this patent
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Abstract
In various embodiments, joined sputtering targets are formed at least in part by spray deposition of the sputtering material and/or welding.
Claims23
-22. (canceled)
A joined sputtering target comprising:
- two sputtering-target tiles (A) each comprising a sputtering material, and (B) at least partially joined together via a mechanical joint at an interface therebetween, the mechanical joint comprising portions of the sputtering-target tiles either (i) overlapping each other or (ii) overlapping and interlocking each other at the interface;
- and
- a region of metal powder disposed over the interface and in contact with the two sputtering-target tiles.
Dependencies are inferred from the claim text.