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US 2015/0311036 A1Published application
Charged particle beam drawing apparatus
AssigneeNuFlare Technology, Inc.
InventorKeita IDENO
Life of this patent
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Abstract
A charged particle beam drawing apparatus according to an embodiment includes; a vacuum vessel including a base plate; a stage provided in the vacuum vessel. and supporting a sample; a stage movement mechanism provided in the vacuum vessel and moving the stage; a two-dimensional scale provided on a lower surface of the stage; a detection unit disposed under the two-dimensional scale and detecting a position of the stage by using the two-dimensional scale; and a support body supporting the detection unit.
Claims15
A charged particle beam drawing apparatus, comprising:
- a vacuum vessel including a base plate;
- a stage provided in the vacuum vessel and supporting a sample;
- a stage movement mechanism provided in the vacuum vessel and moving the stage;
- a two-dimensional scale provided on a lower surface of the stage;
- a detection unit disposed under the two-dimensional scale and detecting a position of the stage by using the two-dimensional scale;
- and
- a support body supporting the detection unit.
4 more elements
Dependencies are inferred from the claim text.