Apparatus and Method for Sample Preparation

A sample preparation apparatus for preparing a cross section of a sample by irradiating the sample with an ion beam, said sample preparation apparatus comprising:

• an ion beam generator producing the ion beam;
• a shield plate disposed to cover a part of the sample and operative to shield the sample from the ion beam;
• and
• a controller for controlling the ion beam generator,
• wherein said controller performs a first operation, wherein the controller controls the ion beam generator such that the ion beam is accelerated by a first accelerating voltage and hits the sample while the sample and the shield plate are located in a given positional relationship, and a second operation, wherein the controller controls the ion beam generator such that the ion beam is accelerated by a second accelerating voltage lower than the first accelerating voltage and hits the sample while the given positional relationship is maintained.