Method, system and computer program product for generating high density registration maps for masks

A system for generating a high density registration map for a mask comprising:

• a data preparation software module which generates a plurality of anchor points, a plurality of sample points, a plurality of weights and at least one first recipe and at least one second recipe;
• a registration tool connected to the data preparation software module to determine data for positions of the anchor points on the mask as well as image render parameters learned from the mask with regard to the at least one first recipe;
• an inspection tool connected to the data preparation software module to determine data for positions of the sample points on the mask with regard to the at least one second recipe;
• and
• a data fusion software module connected to the registration tool, the inspection tool and the data preparation software module in order to generate with the weights at least one registration map with a corrected set of registration points.

A computer program product disposed on a non-transitory computer readable medium comprising:

• computer executable process steps operable to control a computer for:
• obtaining positions of a plurality of anchor points in a mask coordinate system measured by a registration tool according to a predetermined recipe for the registration tool;
• obtaining positions of a plurality of sample points in the mask coordinate system measured by an inspection tool according to a predetermined recipe for the inspection tool;
• and
• calculating from the positions of the anchor points and the positions of the sample points with an influence of weights of anchor points on adjacent sample points on a registration map.