US 2015/0309473 A1 · High Resolution Projection Micro Stereolithography System And Method

Abstract

A high-resolution PμSL system and method incorporating one or more of the following features with a standard PμSL system using a SLM projected digital image to form components in a stereolithographic bath: a far-field superlens for producing sub-diffraction-limited features, multiple spatial light modulators (SLM) to generate spatially-controlled three-dimensional interference holograms with nanoscale features, and the integration of microfluidic components into the resin bath of a PμSL system to fabricate microstructures of different materials.

Claims8

Dependent claims

A projection micro-stereolithography (PμSL) system for producing sub-diffraction-limited features, comprising:

a light source;
a spatial light modulator (SLM) illuminated by the light source;
a reduction lens;
a stereolithographic bath containing a photosensitive resin;
and
a far-field superlens (FSL) contactedly interfacing the photosensitive resin, said FSL including a dielectric layer and a metal grating layer
wherein the FSL is arranged to convert a far-field image produced by the SLM and reduced by the reduction lens into a near-field image for curing select regions of the photosensitive resin.

4 more elements

Dependencies are inferred from the claim text.

Facts

Application

13/149,773Filed 31 May 2011

Priority

28 May 2010

Published

29 Oct 2015

Term ends

Not estimatedThe source records don’t support an estimate.

Classification22 codes

G02B 1/007
Made of materials engineered to provide properties not available in nature, e.g. metamaterials: made of negative effective refractive index materials
B29C 64/124
Using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material: using layers of liquid which are selectively…
B29C 64/135
Characterised by the energy source therefor, e.g. by global irradiation combined with a mask: the energy source being concentrated, e.g. scanning…
B33Y 10/00
Processes of additive manufacturing

High Resolution Projection Micro Stereolithography System And Method

Life of this patent

High Resolution Projection Micro Stereolithography System And Method

Life of this patent

Abstract

Claims8