Vibration Sensor with Bonded Drive
AssigneeVEGA Grieshaber KG
InventorHolger Gruhler
Life of this patent
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Abstract
Vibration sensor comprising a membrane, which can be excited to vibrate by means of a drive, wherein the drive has at least one piezo actuator, which is designed so as to be bonded with the membrane, wherein the membrane has at least one centering device that is designed to be suitable for orienting and keeping the drive centered relative to the membrane.
Claims19
The vibration sensor comprising a membrane, which can be excited to vibrate by means of a drive, wherein the drive has at least one piezo actuator, and is designed so as to be bonded with the membrane, wherein the membrane has at least one centering device that is designed so as to be suitable for orienting the drive centered relative to the membrane.
A production method for a vibration sensor comprising a membrane that can be excited to vibrate by means of a drive, wherein the drive and the membrane are bonded to one another, and the drive has at least one piezo actuator, said production method comprising the steps:
- arranging in a centered manner the drive on the membrane,
- introducing an adhesive into a space, adjacent to the drive and the membrane, whereby the adhesive is distributed between these elements due to a capillary action;
- and
- curing the adhesive.
Dependencies are inferred from the claim text.