Micro-electromechanical apparatus with pivot element

A micro-electromechanical apparatus, comprising:

• a substrate;
• a plurality of first anchors disposed on the substrate;
• a plurality of pivot elements, wherein each of the pivot elements comprises a pivot end and a rotary end;
• a region disposed on the substrate and surrounded by the plurality of first anchors;
• and
• a first frame;
• wherein the plurality of first anchors and the plurality of pivot elements are surrounded by the first frame, each of the pivot ends is connected to a corresponding one of the first anchors and each of the rotary ends is connected to the first frame such that the first frame is configured to rotate with respect to an axis passing through the region, a distance between each of the pivot ends and the axis is equal to a constant, and a width of the pivot end is less than a width of the rotary end.

A micro-electromechanical apparatus, comprising:

• a substrate;
• a plurality of first anchors disposed on the substrate;
• a plurality of pivot elements, wherein each of the pivot elements comprises a pivot end and a rotary end;
• a region disposed on the substrate and surrounded by the plurality of first anchors;
• a first frame;
• at least one first support;
• and
• at least one second support;
• wherein the plurality of first anchors and the plurality of pivot elements are surrounded by the first frame, each of the pivot ends is connected to a corresponding one of the first anchors and each of the rotary ends is connected to the first frame such that the first frame is configured to rotate with respect to an axis passing through the region, a distance between each of the pivot ends and the axis is equal to a constant, and the at least one first support and the at least one second support are connected to a corresponding one of the pivot elements symmetrically.

A micro-electromechanical apparatus, comprising:

• a substrate;
• a plurality of first anchors disposed on the substrate;
• a plurality of pivot elements, wherein each of the pivot elements comprises a pivot end and a rotary end;
• a region disposed on the substrate and surrounded by the plurality of first anchors;
• a first frame;
• and
• a plurality of unbalance masses disposed between the region and the first frame wherein the plurality of first anchors and the plurality of pivot elements are surrounded by the first frame, each of the pivot ends is connected to corresponding one of the first anchors and each of the rotary ends is connected to the first frame such that the first frame is configured to rotate with respect to an axis passing through the region, a distance between each of the pivot ends and the axis is equal to a constant, and each of the unbalance mass has a concave portion facing the axis.