Wafer mapping apparatus and load port including same

A wafer mapping apparatus for commonly mapping differently-sized wafers which are conveyed to a load port and stored in differently-sized containers, the wafer mapping apparatus comprising:

• a mapping sensor which emits a detection wave having a radiation axis extending in a left-right horizontal direction, a left-right span of the mapping sensor being narrower than a span of a front opening of a minimum-sized container among the differently-sized containers, and the mapping sensor being inserted into a front opening of each of the containers and moving in an up-down direction in each of the containers to detect the wafers stored in each of the containers;
• a mapping device which is movable in the up-down direction, the mapping sensor being attached to the mapping device;
• a first protrusion sensor which emits a detection wave having a radiation axis extending in the left-right horizontal direction, and is attached to the mapping device to be separated frontward from the mapping sensor in a moving direction of the mapping sensor so as to detect a protrusion of a wafer stored in each of the containers;
• and
• a second protrusion sensor which emits a detection wave having a radiation axis extending in an up-down moving direction of the mapping sensor, and detects a protrusion of a wafer stored in each of the containers.