Positioning device for horizontal external ignition apparatus

A positioning device for a horizontal external ignition apparatus, the external ignition apparatus comprises an external ignition chamber for igniting a process gas to be supplied to a process chamber and a water cooling device fixed outside the external ignition chamber;

• the positioning device is installed at the bottom of the water cooling device for driving the displacement of the external ignition chamber to make a connecting portion of the external ignition chamber align with a connecting portion of the process chamber;
• wherein the position the positioning device comprises a mounting member fixed at the bottom of the water cooling device and an adjusting component connected with the mounting member to move the mounting member;
• wherein the adjusting component comprises:
• a lifting module having at least one lifting base connected to the mounting member through at least one guiding shaft, and a lifting driving member moving the mounting member longitudinally along the direction of the guiding shaft relative to the lifting base;
• an expansion module having a stretchable expansion member fixed on the lifting base to move the lifting base and the mounting member laterally along the expansion direction of the expansion member;
• a rotating module having a spindle sleeve and a spindle member rotatablely installed in the spindle sleeve;
• the spindle member is fixed to the expansion member to drive the expansion member, the lifting base and the mounting member to rotate horizontally around the spindle member.