Back to results
US 2015/0308586 A1Published application
Lockout tagout for semiconductor vacuum valve
AssigneeASM IP Holding B.V.
InventorsJohn Shugrue, Ron Moen
Life of this patent
Estimating the term…
Abstract
A device for limiting travel of a valve including a body removably connected to a transfer module, a vacuum valve, or a reaction chamber, a travel limiting rod passing through the body to engage and limit travel of the valve, and wherein the body includes at least one mounting flange opposite the travel limiting rod.
Claims20
A device for limiting travel of a valve comprising:
- a body removably connected to a transfer module, a vacuum valve, or a reaction chamber;
- a travel limiting rod passing through the body to engage and limit travel of the valve;
- and
- wherein the body includes at least one mounting flange opposite the travel limiting rod.
1 more element
A method of locking out a vacuum valve comprising the steps of:
- mounting a body to the vacuum valve;
- positioning a travel limiting rod within a portion of the body;
- and
- moving the travel limiting rod to a position which restricts movement of the vacuum valve.
1 more element
Dependencies are inferred from the claim text.