Vacuum processing system, vacuum processing device, lubricating agent supply device, and lubricating agent supplying method

A vacuum processing device provided in a vacuum and capable of receiving a supply of lubricating agent from the lubricating agent supply device provided in the ambient atmosphere, comprising:

• a guide rail;
• a movable body that can move on and along the guide rail;
• and
• a passageway for lubricant flow that is a passageway for the lubricant to be injected at a site that connects to the guide rail of the movable body that is provided at a position that covers a predetermined region of the guide rail;
• wherein the guide rail has a track groove provided along the extending direction, and
• the site that contacts the guide rail is at least a part of a rolling body that contacts the track groove while rolling along the track groove.

The lubricating agent supply device that supplies lubricating agent to the lubricating agent flow channel of the vacuum processing device that has a lubricating agent flow channel which is a channel for the lubricating agent that is introduced to the site subject to lubrication, comprising:

• a lubricating agent storage part that stores the lubricating agent in the ambient atmosphere;
• a lubricating agent supply channel that is connected to the lubricating agent storage part and the lubricating agent flow channel, and is a passageway that guides the lubricating agent that is stored in the lubricating agent storage part to the lubricating agent flow channel;
• and
• an exhausting part that exhausts inside the lubricating agent supply channel.