Mems fabrication tool and method for using
AssigneeKnowles Electronics, LLC
InventorsNithya Jayapratha, Peter V. Loeppert, Jay Cech
Life of this patent
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Abstract
A tool includes a collet, a vacuum path, and a top die. The collet has a first end and a second end. The second end is configured so as to be coupled to an air suction device. The vacuum path is formed inside and along a length of the collet and extends from the first end to the second end of the collet. The top die is coupled to the first end of the collet. The top die includes a plurality of raised islands, and each of the plurality of raised islands including a hole. The hole communicates with the vacuum path such that a suction applied by the suction device draws air through the hole and then through the vacuum path and is sufficient to pick up a MEMS component disposed in proximity to the hole.
Claims14
A tool, the tool comprising:
- a collet having a first end and a second end, the second end being configured so as to be coupled to an air suction device;
- a vacuum path formed inside and along a length of the collet, the vacuum path extending from the first end to the second end of the collet;
- a top die coupled to the first end of the collet;
- wherein the top die includes a plurality of raised islands, each of the plurality of raised islands including a hole, the hole communicating with the vacuum path, such that a suction applied by the suction device draws air through the hole and then through the vacuum path and is sufficient to pick up a MEMS component disposed in proximity to the hole.
Dependencies are inferred from the claim text.