Polishing method and holder
AssigneeFujimi Incorporated
InventorsSHINGO OTSUKI, Hiroshi Asano
Life of this patent
Estimating the term…
Abstract
A polishing method includes a polishing process of polishing a surface to be polished of an object by relatively rotating a holding fixture and a polishing pad with the surface to be polished of the object held on the holding fixture being pressed against and placed in contact with the polishing pad, while supplying a polishing composition onto the polishing pad. During the polishing process, the object held on the holding fixture turns around with the surface to be polished of the object facing the polishing pad to change the orientation of the object.
Claims12
A polishing method comprising a polishing process of polishing a surface to be polished of an object by relatively rotating a holding fixture and a polishing pad with the surface to be polished of the object held on the holding fixture being pressed against and placed in contact with the polishing pad, while supplying a polishing composition onto the polishing pad,
- wherein during the polishing process, the object held on the holding fixture turns around with the surface to be polished of the object facing the polishing pad to change the orientation of the object.
A holding fixture used in a polishing method of polishing a surface to be polished of an object by relatively rotating the holding fixture and a polishing pad with the surface to be polished of the object held on the holding fixture being pressed against and placed in contact with the polishing pad, while supplying a polishing composition onto the polishing pad, the holding fixture comprising:
- a polishing head for holding the object;
- and
- a rotating mechanism for turning around the object held on the polishing head with the surface to be polished of the object facing the polishing pad to change the orientation of the object.
Dependencies are inferred from the claim text.