Imprint template and methods thereof
AssigneeSeagate Technology LLC
InventorsSundeep Chauhan, Alexander Kantorov, Kim Yang Lee, David Kuo, Rene Johannes Marinus Van de Veerdonk, Barmeshwar Vikaramaditya
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AssigneeSeagate Technology LLC
InventorsSundeep Chauhan, Alexander Kantorov, Kim Yang Lee, David Kuo, Rene Johannes Marinus Van de Veerdonk, Barmeshwar Vikaramaditya
Estimating the term…
Provided herein is a method, including forming a first template including a first pattern, wherein forming the first template includes self-assembly of diblock copolymers guided by an initial pattern; forming a second template including a second pattern, wherein the second pattern corresponds to a servo pattern; and forming a master template from the first template, wherein the master template includes one or more portions of the first pattern combined with the second pattern.
A method, comprising:
A method, comprising:
A method, comprising:
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