Adapter for replaceable lamp
AssigneeApplied Materials, Inc.
InventorsJoseph M. RANISH, Oleg V. SEREBRYANOV
Life of this patent
Estimating the term…
Abstract
Embodiments of the present disclosure generally relate to an improved adapter for simplified lamps for use as a source of heat radiation in a rapid thermal processing (RTP) chamber. In one embodiment, a lamp assembly is provided. The lamp element includes a capsule having a filament disposed therein, a press seal extending from the capsule, and an adapter having a receptacle contoured to receive at least a portion of the press seal, wherein the press seal is removably engaged with the adapter.
Claims20
A lamp assembly, comprising:
- a lamp element comprising:
- a capsule having a filament disposed therein;
- and
- a press seal extending from the capsule;
- and
- an adapter removably engaged with at least a portion of the press seal.
(canceled)
A lamp assembly for use in a thermal processing chamber, comprising:
- a capsule having a filament disposed therein and a press seal;
- a first filament lead and a second filament lead, wherein the first and second filament leads extend from the filament to a first metal foil and a second metal foil disposed within the press seal, respectively;
- a first electrically conductive lead and a second electrically conductive lead, wherein the first and second electrically conductive leads electrically connect the first and second metal foils to respective electrically conductive receptacles formed in a circuit board structure positioned external to the lamp assembly;
- and
- an adapter having an opening at first and second ends thereof, wherein the opening at the first end has a receptacle removably engaged with the press seal.
An adapter for a lamp element, comprising:
- an elongate body having a first end and a second end opposing the first end, wherein an opening at the first end has a receptacle that is removably engaged with a seal portion of a capsule having a filament disposed therein, wherein the seal portion encapsulates and creates a hermetic seal about a metal foil connected to the filament of the capsule.
Dependencies are inferred from the claim text.