Electron beam drawing apparatus, electron beam drawing method, and storage medium
AssigneeNippon Control System Corporation
InventorsTakuya Tao, Masakazu Hamaji
Life of this patent
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AssigneeNippon Control System Corporation
InventorsTakuya Tao, Masakazu Hamaji
Estimating the term…
An electron beam drawing apparatus includes: an accepting unit that accepts input graphic information, which is information representing at least one graphic; a graphic width acquiring unit that acquires a width of each of the at least one graphic represented by the input graphic information; a generating unit that generates approximate graphic information representing at least one approximate graphic, which is a graphic configured by at least one rectangle matching the width of the graphic, and is a graphic that approximates each of the at least one graphic represented by the input graphic information; and a drawing unit that draws the at least one approximate graphic represented by the approximate graphic information generated by the generating unit.
An electron beam drawing apparatus, comprising:
An electron beam drawing method performed using an accepting unit, a graphic width acquiring unit, a generating unit, and a drawing unit, comprising:
A non-transitory computer-readable storage medium in which a program is stored, the program causing a computer to function as:
Dependencies are inferred from the claim text.