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US 2015/0177503 A1Published application
Microscope apparatus
AssigneeYokogawa Electric Corporation
InventorHiroyuki SANGU
Life of this patent
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Abstract
A microscope apparatus includes a light source configured to emit a coherent illuminating light, an optical system configured to irradiate a specimen with the illumination light, and a detector configured to form an image based on a light generated from the specimen by the illumination light that irradiates the specimen. The optical system is configured to project a plurality of focal points of the illumination light on the specimen, and allow the plurality of focal points to interfere with each other while changing phases of the plurality of focal points.
Claims13
A microscope apparatus comprising:
- a light source configured to emit a coherent illuminating light;
- an optical system configured to irradiate a specimen with the illumination light;
- and
- a detector configured to form an image based on a light generated from the specimen by the illumination light that irradiates the specimen, wherein
- the optical system is configured to project a plurality of focal points of the illumination light on the specimen, and allow the plurality of focal points to interfere with each other while changing phases of the plurality of focal points.
2 more elements
Dependencies are inferred from the claim text.