Optical apparatus, projection optical system, exposure apparatus, and method of manufacturing article

An optical apparatus that deforms a reflecting surface of a mirror, comprising:

• a base plate;
• a fixing member configured to fix a part of the mirror including a center of the mirror to the base plate;
• and
• a plurality of actuators each having a first end connected to the mirror and a second end connected to the base plate, and configured to apply force to a back face on the opposite side of the reflecting surface,
• wherein the plurality of actuators include a plurality of first actuators and a plurality of second actuators,
• a distance between the first end and the second end of the second actuator changes greater than that of the first actuator when receiving a unit amount of external force, and
• the plurality of first actuators and the plurality of second actuators are arranged such that the distance between each first actuator and the center of the mirror is larger than or equal to a largest value among distances between the respective second actuators and the center of the mirror.

A projection optical system that projects a mask pattern onto a substrate, including an optical apparatus that deforms a reflecting surface of a mirror, comprising:

• a base plate;
• a fixing member configured to fix a part of the mirror including a center of the mirror to the base plate;
• and
• a plurality of actuators each having a first end connected to the mirror and a second end connected to the base plate, and configured to apply force to a back face on the opposite side of the reflecting surface,
• wherein the plurality of actuators include a plurality of first actuators and a plurality of second actuators,
• a distance between the first end and the second end of the second actuator changes greater than that of the first actuator when receiving a unit amount of external force, and
• the plurality of first actuators are arranged such that a distance between each first actuator and the center of the mirror is longer than half of a distance between the center of the mirror and a periphery of the mirror.

An exposure apparatus that exposes a substrate, including a projection optical system that projects a mask pattern onto a substrate, including an optical apparatus that deforms a reflecting surface of a mirror, comprising:

• a base plate;
• a fixing member configured to fix a part of the mirror including a center of the mirror to the base plate;
• and
• a plurality of actuators each having a first end connected to the mirror and a second end connected to the base plate, and configured to apply force to a back face on the opposite side of the reflecting surface,
• wherein the plurality of actuators include a plurality of first actuators and a plurality of second actuators,
• a distance between the first end and the second end of the second actuator changes greater than that of the first actuator when receiving a unit amount of external force, and
• the plurality of first actuators are arranged such that a distance between each first actuator and the center of the mirror is longer than half of a distance between the center of the mirror and a periphery of the mirroraccording to claim

A method of manufacturing an article, the method comprising:

• forming a pattern on a substrate using an exposure apparatus;
• and
• processing the substrate, on which the pattern has been formed, to manufacture the article,
• wherein the exposure apparatus exposes the substrate and includes the projection optical system including the optical apparatus,
• wherein the optical apparatus deforms a reflecting surface of a mirror and includes:
• a base plate;
• a fixing member configured to fix a part of the mirror including a center of the mirror to the base plate;
• and
• a plurality of actuators each having a first end connected to the mirror and a second end connected to the base plate, and configured to apply force to a back face on the opposite side of the reflecting surface,
• wherein the plurality of actuators include a plurality of first actuators and a plurality of second actuators,
• a distance between the first end and the second end of the second actuator changes greater than that of the first actuator when receiving a unit amount of external force, and
• the plurality of first actuators are arranged such that a distance between each first actuator and the center of the mirror is longer than half of a distance between the center of the mirror and a periphery of the mirror.