Magnetic sensor and magnetic detecting method of the same
AssigneeAsahi Kasei Microdevices Corporation
InventorsMasaya YAMASHITA, Yo YAMAGATA, Ken TANAKA, Norihiko MIKOSHIBA
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AssigneeAsahi Kasei Microdevices Corporation
InventorsMasaya YAMASHITA, Yo YAMAGATA, Ken TANAKA, Norihiko MIKOSHIBA
Estimating the term…
The present invention relates to a magnetic sensor and a magnetic detecting method of the same capable of detecting at least a magnetic field perpendicular to a substrate and a magnetic field parallel to the substrate in a state where the respective magnetic field components are mixed. One embodiment of the magnetic sensor detects a magnetic field of the orthogonal three axes, and includes a magnetic detector including a magnetic field sensitive material configured to detect a magnetic field component in a first direction, a magnetic field direction converters configured to convert a magnetic field component in a second direction and a magnetic field component in a third direction into magnetic field components in the first direction, the second direction being perpendicular to the first direction, the third direction being perpendicular to both of the first and the second directions.
A magnetic sensor comprising:
A magnetic sensor comprising:
A magnetic sensor for detecting magnetic field components in two axis directions or three axis directions, the magnetic sensor comprising an arrangement pattern including:
A magnetic detecting method for detecting magnetic field components in two axis directions on the basis of outputs from a first and a second magnetic detectors sandwiched between a first and a second magnetic flux concentrator units and of a output from a third magnetic detector sandwiched between the second and a third magnetic flux concentrator units, wherein
A magnetic detecting method for detecting magnetic field components in two axis directions on the basis of outputs from a first and a second magnetic detectors sandwiched between a first and a second magnetic flux concentrator units and of outputs from a third and a fourth magnetic detectors sandwiched between the second and a third magnetic flux concentrator units, wherein
Dependencies are inferred from the claim text.