Scanning Probe Miscroscope

A scanning probe microscope, comprising:

• a support member that supports a probe;
• a light source that causes excitation light to enter the support member, and
• a near-field light detection sensor that detects near-field light which is generated at a top of the probe by plasmon excited by the excitation light entering the support member and which is scattered from a surface of a measurement object,
• wherein a microstructure that guides the excitation light to an excitation point of the plasmon is provided at a portion, which is irradiated with the excitation light, of the support member.

A scanning probe microscope, comprising:

• a support member that supports a probe;
• a light source that causes excitation light to enter the support member, and
• a near-field light detection sensor that detects near-field light which is generated at a top of the probe by plasmon excited by the excitation light entering the support member and which is scattered from a surface of a measurement object,
• wherein an optical frequency conversion element that converts an optical frequency of the excitation light is provided to the support member.