Angle-Resolved Antisymmetric Scatterometry
AssigneeKLA-Tencor Corporation
InventorsDaniel Kandel, Vladimir Levinski, Noam Sapiens
Life of this patent
Estimating the term…
Abstract
A method for determining an overlay offset may include, but is not limited to: obtaining a first anti-symmetric differential signal (ΔS1) associated with a first scatterometry cell; obtaining a second anti-symmetric differential signal (ΔS2) associated with a second scatterometry cell and computing an overlay offset from the first anti-symmetric differential (ΔS1) signal associated with the first scatterometry cell and the second anti-symmetric differential signal (ΔS2) associated with the second scatterometry cell.
Claims21
A method for determining an overlay offset comprising:
- obtaining a first anti-symmetric differential signal associated with a first scatterometry cell;
- obtaining a second anti-symmetric differential signal associated with a second scatterometry cell;
- and
- computing an overlay offset from the first anti-symmetric differential signal associated with the first scatterometry cell and the second anti-symmetric differential signal associated with the second scatterometry cell.
2-9. (canceled)
A system comprising:
- at least one computing device;
- and
- one or more instructions that, when implemented in the computing device, configure the computing device for:
- obtaining a first anti-symmetric differential signal associated with a first scatterometry cell;
- obtaining a second anti-symmetric differential signal associated with a second scatterometry cell;
- and
- computing an overlay offset from the first anti-symmetric differential signal associated with the first scatterometry cell and the second anti-symmetric differential signal associated with the second scatterometry cell.
A system comprising:
- circuitry for obtaining a first anti-symmetric differential signal associated with a first scatterometry cell;
- circuitry for obtaining a second anti-symmetric differential signal associated with a second scatterometry cell;
- and
- circuitry for computing an overlay offset from the first anti-symmetric differential signal associated with the first scatterometry cell and the second anti-symmetric differential signal associated with the second scatterometry cell.
Dependencies are inferred from the claim text.