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AssigneeReno Technologies, Inc.
InventorsDavid J. Ferran, Robert J. Ferran
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In order to mitigate the negative effects of a change in atmospheric pressure, an improved capacitance diaphragm gauge (CDG) sensor incorporates an independent ambient atmospheric pressure sensor near the CDG sensor body. The ambient atmospheric sensor is located outside the CDG sensor body to sense the ambient atmospheric pressure surrounding the CDG sensor body. The ambient atmospheric sensor provides an output that represents the ambient atmospheric pressure. A sensor output processing circuit receives the output of the ambient atmospheric sensor as well as the output of the CDG sensor. The processing circuit utilizes the output from the ambient atmospheric pressure sensor to fine tune the CDG measurement of pressure by executing an in situ, real time, automatic calibration adjustment of the CDG.
A method for compensating for effects of a variable ambient atmospheric pressure surrounding a capacitance diaphragm gauge (CDG) on the measurement of an absolute pressure applied to an input of the CDG, the method comprising:
The method as defined in claim 4, wherein each respective calibration factor is stored in a lookup table indexed by the values of the ambient atmospheric pressures.
An ambient atmospheric pressure compensation system for a capacitance diaphragm gauge (CDG) that generates a measured absolute pressure value in response to an applied absolute pressure on an input of the CDG, wherein the CDG is subjected to a variable external ambient atmospheric pressure, the pressure compensation system comprising:
Dependencies are inferred from the claim text.