Sensors having a deformable membrane

Abstract

A pressure sensing element has at least a housing containing a fluid. The housing has at least two moveable surfaces in contact with the fluid in the housing; There is a first moveable surface comprising a pressure application surface which, when moved towards, away from, into or out of the fluid, creates a change in fluid pressure and a second moveable surface in contact with the fluid in the housing comprising a membrane which, when deformed by pressure changes in the fluid, alters its electrical resistance. The membrane has two electrodes attached to deformable material in the membrane. The membrane my have an elastomer having conductive particles distributed therein. The elastomer may be a dielectric and the particles are conductive nanoparticles.

Dependencies are inferred from the claim text.