Sample holder for annealing apparatus and electrically assisted annealing apparatus using the same
AssigneeIndustrial Technology Research Institute
InventorsHsu-Shen Chu, Chien-Neng Liao, Yao-Hsiang Chen
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AssigneeIndustrial Technology Research Institute
InventorsHsu-Shen Chu, Chien-Neng Liao, Yao-Hsiang Chen
Estimating the term…
A sample holder for annealing apparatus and electrically assisted annealing apparatus using the same are provided. The sample holder includes a heat conductive shell, high thermal conductive and electrical insulation blocks, first and second electrodes. The heat conductive shell includes a base frame and a top cover. The high thermal conductive and electrical insulation blocks are adjacent to the base frame and the top cover, respectively, and a sample pallet is sandwiched therebetween. Length and width of the sample pallet is smaller than that of the high thermal conductive and electrical insulation blocks. The first and the second electrodes are fixed to two sides of the sample pallet, and are connected to electrifying wire respectively. Thickness of the first and the second electrodes is smaller than that of the sample pallet, while the width of the first and the second electrodes is longer than that of the sample pallet.
A sample holder for annealing apparatus, comprising:
Dependencies are inferred from the claim text.