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US 2015/0176897 A1Published application
Sealing member and substrate processing apparatus including the same
AssigneeSamsung Electronics Co., Ltd.
InventorsYong-Myung JUN, Yong-Sun KO, Kun-Tack LEE, Il-Sang LEE, Ji-Hoon JEONG, Yong-Jhin CHO, Jin-Suk HONG
Life of this patent
Estimating the term…
Abstract
A sealing member includes a body having a ring shape, a lower contacting portion protruding from a lower end of the body and having at least one recess, the recess provided in a lower surface of the lower contacting portion and extending in a radial direction of the body, and an outer contacting portion protruding outwards from the body along an outer side portion of the body.
Claims22
A sealing member, comprising:
- a body having a ring shape;
- a lower contacting portion protruding from a lower end of the body and having at least one recess, the recess provided in a lower surface of the lower contacting portion and extending in a radial direction of the body;
- and
- an outer contacting portion protruding outwards from the body along an outer side portion of the body.
1 more element
11-14. (canceled)
A sealing member, comprising:
- a deformable body;
- a first contacting portion of the deformable body including at least one recess;
- and
- a second contacting portion of the deformable body including at least one indentation, the at least one recess, the at least one indentation and a receiving groove of a process chamber forming an auxiliary space in which reaction byproducts are collected and exhausted from the process chamber.
1 more element
(canceled)
Dependencies are inferred from the claim text.