Vacuum pump
AssigneeShimadzu Corporation
InventorTetsuya TSUBOKAWA
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AssigneeShimadzu Corporation
InventorTetsuya TSUBOKAWA
Estimating the term…
A vacuum pump comprises a vacuum exhaust section, the vacuum exhaust section including a stator, and a rotor having a rotor cylindrical section, the rotor cylindrical section discharging gas in cooperation with the stator, a suction port; a base; an exhaust port disposed on the base, wherein at least a part of the exhaust port faces an outer peripheral surface of the stator, and gas sucked through the suction port by the vacuum exhaust section is discharged through the exhaust port; and a conductance increasing function section formed on at least one of the outer peripheral surface of the stator and an inner peripheral surface of the base, the outer peripheral surface and the inner peripheral surface facing an exhaust path for gas discharged by the rotor cylindrical section and the stator leading to the exhaust port.
A vacuum pump comprising:
Dependencies are inferred from the claim text.