US 2015/0174730 A1 · Low Magnetic Chemical Mechanical Polishing Conditioner

Abstract

The present invention relates to a low magnetic chemical mechanical polishing conditioner, comprising a substrate; a bonding layer disposed on the substrate; and a plurality of abrasive particles placed on the bonding layer, and the abrasive particles are placed on the substrate by the bonding layer; wherein the abrasive particles are screened into a non-magnetic content and a low magnetic content through a magnetic separation device. Therefore, the abrasive particles used in the low magnetic chemical mechanical polishing conditioner of the present invention are non-magnetic abrasive particles perfectly to avoid influence of polishing performance due to magnetic abrasive particles.

Claims16

Dependent claims

A low magnetic chemical mechanical polishing conditioner, comprising:

a substrate;
a binding layer disposed on a surface of the substrate;
and
a plurality of abrasive particles embedded in the binding layer and fixed to the substrate by the binding layer;
wherein the abrasive particles are screened into a non-magnetic content and a low magnetic content through a magnetic separation device.

2 more elements

Dependencies are inferred from the claim text.

Facts

Application

14/561,022Filed 4 Dec 2014

Priority

TW 10214739420 Dec 2013

Published

25 Jun 2015

Term ends

Not estimatedThe source records don’t support an estimate.

Classification7 codes

B24B 53/017
Devices or means for dressing or conditioning abrasive surfaces: devices or means for dressing, cleaning or otherwise conditioning lapping tools
B03C 1/0332
Characterised by the magnetic circuit: using permanent magnets
B03C 1/12
With cylindrical material carriers: with magnets moving during operation; with movable pole pieces
B03C 1/16
Acting directly on the substance being separated: with material carriers in the form of belts

Low Magnetic Chemical Mechanical Polishing Conditioner

Life of this patent

Low Magnetic Chemical Mechanical Polishing Conditioner

Life of this patent

Abstract

Claims16