Article and process for selective etching
AssigneeThe United States of America as represented by the Secretary of Commerce
InventorOWEN HILDRETH
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Abstract
A process for etching includes disposing an activating catalyst on a substrate; providing a vapor composition that includes an etchant oxidizer, an activatable etchant, or a combination thereof; contacting the activating catalyst with the etchant oxidizer; contacting the substrate with the activatable etchant; performing an oxidation-reduction reaction between the substrate, the activatable etchant, and the etchant oxidizer in a presence of the activating catalyst and the vapor composition; forming an etchant product that includes a plurality of atoms from the substrate; and removing the etchant product from the substrate to etch the substrate.
Claims20
A process for etching, the process comprising:
- disposing an activating catalyst on a substrate;
- providing a vapor composition comprising an etchant oxidizer, an activatable etchant, or a combination comprising at least one of the foregoing;
- contacting the activating catalyst with the etchant oxidizer;
- contacting the substrate with the activatable etchant;
- performing an oxidation-reduction reaction between the substrate, the activatable etchant, and the etchant oxidizer in a presence of the activating catalyst and the vapor composition;
- forming an etchant product comprising a plurality of atoms from the substrate;
- and
- removing the etchant product from the substrate to etch the substrate.
Dependencies are inferred from the claim text.