Method for producing polymer compound, polymer compound, and photoresist resin composition
AssigneeDaicel Corporation
InventorsAkira Eguchi, Masamichi Nishimura
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AssigneeDaicel Corporation
InventorsAkira Eguchi, Masamichi Nishimura
Estimating the term…
Provided is a method for producing a polymer compound that has very low contents of impurities such as metal components and exhibits excellent storage stability. The production method gives such a polymer compound. The polymer compound is incorporated into a photoresist resin composition. The method for producing a polymer compound includes the step of filtering a resin solution containing a polymer compound through a filter. The filter is approximately devoid of strongly acidic cation-exchange groups and develops a positive zeta potential. The polymer compound includes a monomer unit (a) and a monomer unit (b). The monomer unit (a) includes at least one monomer units represented by Formulae (a1) to (a3). The monomer unit (b) contains a group capable of releasing a moiety thereof by the action of an acid to develop solubility in an alkali.
A method for producing a polymer compound, the method comprising the step of filtering a resin solution comprising a polymer compound through a filter,
Dependencies are inferred from the claim text.