Ferroelectric ceramics and method for manufacturing the same
AssigneeYoutec Co., Ltd.
InventorsTakeshi KIJIMA, Yuuji HONDA, Yukinori TANI
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Abstract
An aspect of the present invention relates to ferroelectric ceramics including a stacked film formed on a Si substrate, a Pt film formed on the stacked film, a SrTiO3 film formed on the Pt film, and a PZT film formed on the SrTiO3, wherein the stacked film is formed by repeating sequentially N times a first ZrO2 film and a Y2O3 film, and a second ZrO2 film is formed on the film formed repeatedly N times, the N being an integer of 1 or more. It is preferable that a ratio of Y/(Zr+Y) of the stacked film is 30% or less.
Claims33
Ferroelectric ceramics comprising:
- a Pt film formed on a ZrO2 film;
- a SrTiO3 film formed on said Pt film;
- and
- a PZT film formed on said SrTiO3 film.
Ferroelectric ceramics comprising:
- a Pt film formed on a stacked film;
- a SrTiO3 film formed on said Pt film;
- and
- a PZT film formed on said SrTiO3 film, wherein,
- said stacked film is a film formed by repeating N times sequentially a first ZrO2 film and a Y2O3 film, and a second ZrO2 film is formed on said film formed repeatedly N times;
- and
- said N is an integer of 1 or more.
Ferroelectric ceramics comprising:
- an oxide film of a metallic crystal having a body-centered cubic lattice structure formed on a stacked film;
- a Pt film formed on said oxide film;
- and
- a PZT film formed on said Pt film, wherein,
- said stacked film is a film formed by repeating N times sequentially a first ZrO2 film and a Y2O3 film, and a second ZrO2 film is formed on said film formed repeatedly N times;
- said N is an integer of 1 or more;
- and
- a ratio of Y/(Zr+Y) of said stacked film is 30% or less.
Ferroelectric ceramics comprising:
- an oxide film of a metallic crystal having a body-centered cubic lattice structure formed on a stacked film;
- a Pt film formed on said oxide film;
- a SrTiO3 film formed on said Pt film;
- and
- a PZT film formed on said SrTiO3 film, wherein, said stacked film is a film formed by repeating N times sequentially a first ZrO2 film and a Y2O3 film, and a second ZrO2 film is formed on said film formed repeatedly N times;
- said N is an integer of 1 or more;
- and
- a ratio of Y/(Zr+Y) of said stacked film is 30% or less.
A manufacturing method of ferroelectric ceramics, comprising:
- a first step of forming sequentially a first ZrO2 film and a Y2O3 film on a Si substrate;
- a second step of forming a second ZrO2 film on said Y2O3;
- a third step of forming a Pt film on said second ZrO2 film;
- a fourth step of forming a SrTiO3 film on said Pt film;
- a fifth step of forming, on said SrTiO3 film, a PZT amorphous film short of lead or a PZT amorphous film having a stoichiometric composition;
- and
- a sixth step of forming, on said SrTiO3 film, a PZT film obtained by crystallizing said PZT amorphous film by performing a heat treatment on said PZT amorphous film in a pressurized oxygen atmosphere.
Dependencies are inferred from the claim text.