Method and apparatus for forming organic monolayer
AssigneeTokyo Electron Limited
InventorsTakashi FUSE, Tomohito MATUO, Hidetoshi KINOSHITA
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Abstract
A method for forming an organic monolayer includes supplying to an object an organic material gas including organic molecules, each molecule having a binding site that is to be chemically bonded to a surface of the object. The method further includes supplying excited hydrogen to the organic material gas before the organic material gas reaches the object to substitute an end of the binding site with hydrogen, and forming an organic monolayer by reaction between the end substituted with the hydrogen and the object.
Claims12
A method for forming an organic monolayer, comprising:
- supplying to an object an organic material gas including organic molecules, each molecule having a binding site that is to be chemically bonded to a surface of the object;
- supplying excited hydrogen to the organic material gas before the organic material gas reaches the object to substitute an end of the binding site with hydrogen;
- and
- forming an organic monolayer by reaction between the end substituted with the hydrogen and the object.
An apparatus for forming an organic monolayer on a surface of an object, the apparatus comprising:
- a chamber configured to accommodate the object;
- an organic material gas supply unit configured to supply into the chamber an organic material gas including organic molecules, each molecule having a binding site that is to be chemically bonded to the surface of the object;
- an excited hydrogen generation mechanism configured to generate excited hydrogen in the chamber;
- and
- a gas exhaust unit configured to exhaust an inside of the chamber;
- and
- a control unit configured to supply the excited hydrogen from the excited hydrogen generation mechanism to the organic material gas supplied from the organic material gas supply unit before the organic material gas reaches the object in the chamber, so that an end of the binding site of each organic molecule is substituted with hydrogen and an organic monolayer is formed by reaction between the end substituted with the hydrogen and the object.
Dependencies are inferred from the claim text.