Method for making a scissoring-type current-perpendicular-to-the-plane (cpp) magnetoresistive sensor with exchange-coupled soft side shields

A method for making a scissoring type current-perpendicular-to-the-plane magnetoresistive sensor, the sensor having a first free ferromagnetic layer (FL1) and a second free ferromagnetic layer (FL2) separated by a nonmagnetic spacer layer, wherein the FL1 and FL2 magnetization directions are free to rotate relative to one another in the presence of an external magnetic field to be sensed, the method comprising:

• providing a bottom shield S1;
• depositing FL1, the nonmagnetic spacer layer and FL2 on S1;
• patterning FL1, the nonmagnetic spacer layer and FL2 to define spaced-apart side edges at FL1, the nonmagnetic spacer layer and FL2;
• depositing a layer of insulating material on S1 and on the side edges;
• depositing, by ion beam deposition, a first layer of soft ferromagnetic material on S1 and in contact with the insulating layer at the side edges of FL1, the nonmagnetic spacer layer and FL2;
• performing oblique angle ion milling of the first layer of soft ferromagnetic material to remove the first layer of soft ferromagnetic material adjacent the side edges of FL2, said ion milling being performed at an greater than or equal to 50 degrees and less than or equal to 85 degrees from a normal to S1;
• depositing an antiparallel coupling (APC) layer on the first layer of soft ferromagnetic material;
• and
• depositing a second layer of soft ferromagnetic material on the APC layer and in contact with the insulating layer at the side edges of FL2.