Pick-and-place head and method for picking work-pieces
AssigneeKLA-Tencor Corporation
InventorCarl Truyens
Life of this patent
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AssigneeKLA-Tencor Corporation
InventorCarl Truyens
Estimating the term…
A pick-and-place head for picking a plurality of work-pieces from at least one first location and for placing the plurality of work-pieces at least one second location is disclosed. The pick-and-place head exhibits a plurality of nozzles, wherein each nozzle is configured to engage one of the work-pieces by action of a vacuum. At least one nozzle has an individual vacuum supply and at least two further nozzles have a shared vacuum supply. A corresponding method is also disclosed, the method including the steps of approaching at least one of the plurality of work-pieces with a respective nozzle and then starting generation of a vacuum at each respective nozzle. The generation of vacuum in at least one nozzle is achieved by an individual vacuum supply, and generation of vacuum in at least two further nozzles is achieved by a shared vacuum supply of the at least two further nozzles.
A pick-and-place head for transporting a plurality of work-pieces from at least one first location to at least one second location, the pick-and-place head comprising:
A pick-and-place head for transporting a plurality of work-pieces from at least one first location to at least one second location, the pick-and-place head comprising:
A pick-and-place device, comprising:
A method for picking a plurality of work-pieces with a plurality of nozzles by action of a vacuum, for placing the work-pieces at a different location, the method comprising the steps of:
A method for picking a plurality of work-pieces with a plurality of nozzles by action of a vacuum, for placing the work-pieces at a different location, wherein the plurality of work-pieces and the plurality of nozzles are arranged in respective rows, the nozzles of one first row of nozzles each having an individual vacuum supply, the nozzles of the remaining at least one second row of nozzles having a shared vacuum supply, the method comprising the steps of:
Dependencies are inferred from the claim text.