Microphone
AssigneeElectronics and Telecommunications Research Institute
InventorsChang Han JE, Jaewoo LEE, Woo Seok YANG, Jong-Kee KWON
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Abstract
Provided is a microphone. The microphone includes a substrate including an acoustic chamber, a lower backplate disposed on the substrate, a diaphragm spaced apart from the lower backplate on the lower backplate, the diaphragm having a diaphragm hole passing therethrough, a connection unit disposed on the lower backplate to extend through the diaphragm hole, and an upper backplate disposed on the connection unit, the upper backplate being spaced apart from the diaphragm. Thus, the microphone may be improved in sensitivity and reliability.
Claims14
A microphone comprising:
- a substrate comprising an acoustic chamber;
- a lower backplate disposed on the substrate;
- a diaphragm spaced apart from the lower backplate on the lower backplate, the diaphragm having a diaphragm hole passing therethrough;
- a connection unit disposed on the lower backplate to extend through the diaphragm hole;
- and
- an upper backplate disposed on the connection unit, the upper backplate being spaced apart from the diaphragm.
A microphone comprising:
- a substrate comprising an acoustic chamber;
- a lower backplate disposed on the substrate;
- a diaphragm spaced apart from the lower backplate on the lower backplate, the diaphragm having a plurality of diaphragm holes passing therethrough;
- an upper backplate disposed above the diaphragm so that the upper backplate is spaced apart from the diaphragm;
- and
- connection units disposed between the lower backplate and the upper backplate to respectively pass through the diaphragm holes.
Dependencies are inferred from the claim text.