Coated x-ray window
AssigneeExcillum AB
InventorsTomi Tuohimaa, Oscar Hemberg
Life of this patent
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Abstract
An X-ray window includes a primary and a secondary window element. In order to evaporate debris by ohmic heating, current flows through the secondary (upstream) window element. Meanwhile, electric charge originating from electron irradiation and/or depositing charged particles is to be drained off the secondary window element via a charge-drain layer. To prevent large debris particles from short-circuiting the secondary window element, the current for heating the window element flows through heating circuitry which is electrically insulated from the charge-drain layer.
Claims19
An X-ray window for separating an ambient pressure region from a reduced pressure region, the window comprising:
- a primary X-ray-transparent window element separating the ambient pressure region from an intermediate region;
- a secondary window element separating the intermediate region from the reduced pressure region, which secondary window element comprises a side facing the reduced pressure region for receiving a contaminant depositing thereon;
- and
- heating means for applying an electric voltage between terminals of said secondary window element for thereby evaporating contaminant having deposited thereon,
- wherein said secondary window element comprises:
- a charge-drain layer, which faces the reduced pressure region and is connected to a charge sink;
- and
- heating circuitry, which is electrically insulated from the charge-drain layer, wherein said terminals, between which the voltage is applied, are located at a plurality of distinct points on the heating circuitry.
Dependencies are inferred from the claim text.